Testing of MEMS based Inertial Sensors
نویسندگان
چکیده
New technologies based on micro-technology, so called MEMS (Micro ElectroMechanical Systems), have been enabling many new products over the last ten years such as inkjet printers, displays or pressure sensors. Focusing on measurement of motion, MEMS inertial sensors such as accelerometers and gyroscopes, open new application fi elds for three big branches: Testing of MEMS based Inertial Sensors Thomas Link, HSG-IMIT
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